Hitachi HD-2700 200-kV STEM/SEM Procedures 1 Ǻ SEM Resolution

This paper introduces a technology breakthrough: atomic resolution secondary electron imaging has been realized, for the first time, on Hitachi 200-300 kV STEM/SEM and TEM/STEM/SEM correlative electron microscopes.  Interior and surface structures of materials can now be imaged at atomic resolution simultaneously.  This breakthrough opens a wide variety of applications in materials science, nanoscience, and semiconducting metrology.